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中文摘要：
针对具有七自由度化学机械抛光传输机器人(CMPTR),运用拉格朗日方程和牛顿力学相结合的方法,建立非线性系统CMPTR的动力学模型.对模型进行泰勒级数展开,并线性化得CMPTR状态空间方程,便于使用LQ最优控制对其进行控制.其中性能指标是由各状态量的累积运动误差与控制量的代数和构成,通过寻找一条最优控制律使其最小,从而使CMPTR的精度和控制能量消耗都取得满意效果.仿真实验验证了系统的稳定性,也验证了系统建模和LQ控制器设计的合理性和有效性.
英文摘要：
针对具有七自由度化学机械抛光传输机器人(CMPTR),运用拉格朗日方程和牛顿力学相结合的方法,建立非线性系统CMPTR的动力学模型.对模型进行泰勒级数展开,并线性化得CMPTR状态空间方程,便于使用LQ最优控制对其进行控制.其中性能指标是由各状态量的累积运动误差与控制量的代数和构成,通过寻找一条最优控制律使其最小,从而使CMPTR的精度和控制能量消耗都取得满意效果.仿真实验验证了系统的稳定性,也验证了系统建模和LQ控制器设计的合理性和有效性.
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