中文摘要：

过渡金属氧化物NTC热敏材料具有良好的电阻-温度特性，是理想的温度传感材料。特别是薄膜材料，由于晶粒间的不完全接触和空洞的减少，可能从根本上解决目前广泛使用的体材热敏材料存在的稳定性和重复性差的问题。分析对比了几种常用的薄膜制备方法，认为溅射镀膜法更容易得到致密、平整的热敏薄膜；阐述了NTC热敏材料两种主要的电子传导模型：最近邻跳跃（NNH）模型ρ（T）=CT·exp（T0／T）和变程跳跃（VRH）模型ρ（T）=CT^2p·exp（T0／T）^p；介绍了当前薄膜热敏电阻的研究现状和存在的主要问题。

英文摘要：

Negative temperature coefficient（NTC） thermistors, often consisting of transition metal oxides and with the favorable resistivity-temperature property, are employed as temperature sensors and other thermistor devices. Specially, thin films can eliminate many of uncertainties caused by the lack of reproducibility encountered in bulk materials due to porosity and other inhomogeneities. In this paper, several methods of preparing thermosensitive thin-films are analyzed and compared. The sputtering technique is a better kind of method for producing dense and smooth thermosensitive films. Two main electron transport models in NTC thermistors are described, which are nearest neighbor hopping（NNH） model（ρ（T） =CT · exp（T0/T）） and different variable range hopping（VRH） models（ρ（T） = CT^2p · exp（T0/T）^p）. The current status and problems of film thermistors research are introduced.