中文摘要：

由于当前四梁纤毛式MEMS矢量水听器的灵敏度与带宽之间相互制约,要想提高水听器的灵敏度往往需要以大幅牺牲带宽为代价,针对此问题提出了杯型矢量水听器,在大幅提高水听器灵敏度的同时仍具有一定的带宽,满足MEMS矢量水听器低频高灵敏度的工程应用要求。通过ANSYS对杯型微结构进行仿真分析,保证水听器的灵敏度及工作带宽。驻波场测试结果表明,杯型矢量水听器的灵敏度在400 Hz可达到-192 dB（前置放大40 dB）,具有20~400 Hz的可测带宽,在满足测试带宽的基础上大幅提高了矢量水听器的灵敏度,同时满足灵敏度每频程6 dB的增长趋势,具有良好的＂8＂字型指向性,凹点深度为31.6 dB。

英文摘要：

Due to the inter-constraint between the sensitivity and bandwidth of the current MEMS vector hydrophone based on four-beam microstructure and hair,the sensitivity of the MEMS vector hydrophones can be improved at the cost of sacrificing the bandwidth.The cup-shaped MEMS vector hydrophone was presented to resolve this problem.The sensitivity of the hydrophone was improved sharply and a certain bandwidth was obtained simultaneously,meeting the engineering application requirements of the low-frequency and higher sensitivity for the MEMS vector hydrophone.The cup-shaped microstructure was simulated and analyzed by using ANSYS,and the sensitivity and bandwidth of the hydrophone were ensured.The test results of the standing-wave field show that the sensitivity of the cup-shaped vector hydrophone reaches-192 dB at 400 Hz（40 dB pre-amplification）,the measurable bandwidth of the hydrophone is 20-400 Hz,the sensitivity of the vector hydrophone increases significantly on the basis of meeting the test bandwidth.Meanwhile,the sensitivity of the vector hydrophone increases 6 dB for each frequency range,the cup-shaped MEMS vector hydrophone possesses the good ＂8＂ shape directivity,and the depth of the concave point is 31.6 dB.