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The effect of ion source working power on the composition and optical properties of TiO2 films bomba
  • ISSN号：0257-8972
  • 期刊名称：SURFACE & COATINGS TECHNOLOGY
  • 时间：2013.3.25
  • 页码：88-93
  • 相关项目：a-SiOxNy薄膜化学键结构与缺陷形成机理的研究
作者： Liu, Honglin|Li, Li|Yao, Tingting|Ding, Wanyu|Ju, Dongying|Chai, Weiping|
同期刊论文项目
a-SiOxNy薄膜化学键结构与缺陷形成机理的研究
期刊论文 15 会议论文 2
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