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Temperature effects on the growth and electrical properties of Er2O3 ?lms on Ge substrates
  • 期刊名称：Thin solid Films
  • 时间：0
  • 页码：3406-3409
  • 语言：英文
  • 相关项目：非晶稀土氧化物高k栅介质材料的制备及物理特性研究
作者： Z. B. Fang et al.|J. Cui|Z. M. Jiang|T. X. Nie|T. Ji|
同期刊论文项目
非晶稀土氧化物高k栅介质材料的制备及物理特性研究
期刊论文 26 专利 1
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