中文摘要：

采用聚合物前驱体法，在LaNiO3／Si（100）衬底上低温制备了Pr^3＋掺杂SrTiO3薄膜。用XRD、AFM、PL手段分析了薄膜的晶体结构、表面形貌与发光性能。结果显示，退火温度决定SrTiO3薄膜的晶粒大小和表面形貌，在600℃退火2h获得的薄膜表面均匀、无裂痕，晶粒大小约为60nm，表面粗糙度约为2．5nm。该薄膜样品的发光集中在490，592和616am三个波段，主要对应于Pr^3＋的^1D2→^3H4和^3P0→^3H4的能级跃迁。这种高稳定性、水溶液基方法制备的薄膜具有优良的发光性能，有利于其在发光器件中的应用。

英文摘要：

Pr^3＋-doped SrTiO3 thin films were fabricated on LaNiO3/Si（100） substrate at low annealing temperature by polymeric precursor method. The crystal structure, surface morphology and luminescence properties of prepared thin films were studied by XRD, AFM and PL. The results show that, the grain size and surface morphology of prepared thin films are strongly influenced by the annealing temperature. When the thin film is prepared after annealing at 600 ℃ for 2 h, it is found to be smooth and crack free, with grain size and root-mean-square （RMS） surface roughness value of about 60 nm and 2.5 nm. Photoluminescence emission peaks are observed at 490, 592 and 616 nm, which can be attributed to the energy-level transitions of ^1D2→^3H4 and ^3P0→^3H4 of Pr^3＋. The thin films with good luminescence properties have potential application in the light-emitting device due to the highly stable, water-based solution deposition method.