中文摘要：

以（CH，COO）2Zn·2H2O和AlCl3·6H2O为前驱物，以普通玻璃为基底利用溶胶-凝胶旋转涂膜法制备AZO薄膜。采用x射线衍射仪、扫描电子显微镜、紫外．可见分光光度计、四探针电阻测试仪等对AZO薄膜的物相组分、表面形貌、透射率和方块电阻进行测量与表征，并研究了热处理温度和掺铝量对AZO薄膜的结构和光电性能的影响。结果表明：AZO薄膜的结构和光电性能与不同的热处理温度和掺铝量有关，实验得到了最佳的工艺条件为热处理温度为500℃，热处理时间为60min，掺Al溶度为1m01％，镀膜层数为8层。

英文摘要：

The AZO thin films were prepared on the glass substrates by sol-gel with rotating film method using （CH3COO）2Zn · 2H2O and AIC13 · 6H20 as precursors： The phase composition, morphology, transmittance and square resistance of AZO thin film were measured and characterized by X-ray diffraction, scanning electron microscopy, UV-Vis spectrophotometer, four-probe resistance tester, respectively. The effects of heat treatment and doped A1 concentration on the phase structure and optical property of AZO thin films were studied. The results showed that the phase structure and optical properties of AZO thin films were related to the diffrent heat treatment and doped Al concentration. The optimum parameters： the heat treatment temperature and time were 500 ℃ and 60 min; the doped Al concentration was 1 mol%, the coating layer was 8.