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A novel method to reduce the period limitation in laser interference lithography
  • ISSN号：0306-8919
  • 期刊名称：Optical and Quantum Electronics
  • 时间：2015.1.3
  • 页码：2331-2338
  • 相关项目：III族氮化物中极化诱导掺杂效应的物性研究及其应用验证
作者： Haiqiang Jia|Wenxin Wang|Junming Zhou|Hong Chen|
同期刊论文项目
III族氮化物中极化诱导掺杂效应的物性研究及其应用验证
期刊论文 21
同项目期刊论文
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Fabrication of GaN-based LEDs with 22° undercut sidewalls by inductively coupled plasma reactive ion etching＊
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