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Fabrication of large-area nano-scale patterned sapphire substrate with laser interference lithography
  • ISSN号：1673-1905
  • 期刊名称：《光电子快报：英文版》
  • 时间：0
  • 分类：TN305.7[电子电信—物理电子学] O484.1[理学—固体物理;理学—物理]
  • 作者机构：Institute of Physics, Chinese Academy of Sciences, Beijing 100190, China
  • 相关基金：the National High Technology Research and Development Program of China（Nos.2011AA03A112 and 2011AA03A106）; the National Natural Science Foundation of China（Nos.11204360 and 61210014）
作者： 禤铭东, 戴隆贵, 贾海强, 陈弘
关键词： 蓝宝石衬底, 激光干涉, 图案化, 纳米级, 干涉光刻, 基板, 制造, 面积
中文摘要：

E-mail： hchen@aphy.iphy.ac .cn

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期刊信息
  • 《光电子快报：英文版》
  • 主管单位:
  • 主办单位:天津理工大学
  • 主编：巴恩旭
  • 地址：天津市西青区宾水西道391号
  • 邮编：300384
  • 邮箱：Oelett@yahoo.com.cn
  • 电话：022-23679707 23657134
  • 国际标准刊号：ISSN：1673-1905
  • 国内统一刊号：ISSN：12-1370/TN
  • 邮发代号:6-198
  • 获奖情况:
  • 中国期刊方阵“双效”期刊
  • 国内外数据库收录:
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  • 被引量:147