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中文摘要：
利用CCD成像技术,设计出一种简单的测量垂直腔面发射激光器（VCSEL）的光束质量因子M^2的方法。在注入电流分别为900mA,1500mA,3000mA和6000mA时,对出光孔径300μm,激射波长为980nm的垂直腔底面发射激光器的束腰等光束参数进行了测量,并应用激光光束传播的高斯方程拟合求得了M^2因子的值分别为66,58,44和53。另外,当注入电流为900mA和3000mA时,对器件的远场分布进行了分析并测得了器件的远场发散角,测量值与理论计算值吻合较好。
英文摘要：
A simple method to measure the beam quality factor （M^2） of high-power vertical-cavity surface-emitting laser （VCSEL） was designed by employing the charge coupled device （CCD） technology. When the injection currents were 900 mA, 1500 mA, 3000 mA and 6000 mA, respectively, the waists of a 980 nm bottom-emitting VCSEL with a 300 μm aperture were measured and the values of M^2 were 66, 58, 44 and 53, respectively, which were calculated by Gauss fitting. In addition, far-field pattern was analyzed as the injection currents were 900 mA and 3000 mA. At the same time, far-field angles were measured and the values of them were in good agreement with the calculated value exactly.
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