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中文摘要：
采用微透镜作为输出耦合镜,与垂直腔面发射激光器（VCSEL）的p-DBR和n-DBR构成复合腔,可以获得大功率单横模激光输出,改善光束质量。在GaAs衬底上采用限制扩散湿法刻蚀技术制作出不同直径的微透镜,研究了微透镜形成的基本原理、工艺流程,通过控制腐蚀的时间和腐蚀溶液的配比度,得到了不同曲率半径的微透镜,并且对微透镜表面形貌进行了研究。
英文摘要：
Microlens can be used to realize high power and single transverse mode by forming a compound cavity with p-DBR and reDBR of the vertical cavity surface emitting laser（VCSEL） chip. Mierolenses with different diameters are fabricated on the n-side of the VCSEL wafer by using diffusion-limited wet etching. With the diameter of 600 tLm,the roughness of the lens surface is 15.55 nm,the curvature radius is 959. 66 μm,the focal length is 369.1 μm With the smaller diameter of 200μm,the roughness of the lens surface is 12. 56 nm,the curvature radius is 959. 86μm,the focal length is 369. 18 μm. The solution ratio of HBr, H2O2 ,H2O is the major factor to impact the etching rate. Also the temperature of environment is the important factor to form the smooth surface of lens.
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