中文摘要：

设计了一种基于单片STM32F4芯片的时栅位移传感器信号处理系统，将驱动电源、信号采样以及数据处理与误差补偿集成在一片芯片中完成，采用数字频率直接合成（DDS）技术进行激励源的设计，利用输入捕获方式进行高频时钟脉冲插补来采集测量信号，由芯片集成的单周期DSP指令部件完成数据计算，并采用傅氏级数谐波修正技术来进行误差修正。实验表明：采用该系统后，72对极时栅误差峰峰值为3．29”，在保证精度的同时实现了时栅信号处理系统的集成化、小型化，降低了生产成本。

英文摘要：

A signal processing system of time grating displacement sensor based on MCU STM32F4 is designed. It integrates the signal acquisition and data processing, drive power and error compensation on one chip, and develops design of driving source with DDS. By the means of input capture, for high frequency clock pulse interpolation to collect measurement signals. This system manages to complete data computation in a one-cycle DSP instruction part integrated by chips and error correction with harmonic correction techniques of Fourier series. Experiment indicates that the 72 pairs polar time grating error peak-to-peak value is only 3.29,since this system is adopted, which ensure precision at the same time achieve integration and miniaturization of time-grating signal processing system and reduce the cost.