中文摘要：

时栅转台精度的标定是时栅产业化过程中非常重要的一道工序,是时栅转台精度和可靠性体现。针对传统的标定系统采用激光干涉仪、光电自准直仪和金属多面体,人工操作效率低,可靠性差,提出用自制的数控控制箱结合嵌入式技术,开发了一种时栅转台自动标定系统。该系统以高精度的海德汉圆光栅RCN8510作为基准量仪,双微控制器与上位机为基础,形成双闭环控制结构,实现了实时在线误差修正与补偿。实验结果表明：采用双闭环控制系统时栅转台标定系统具有较高的稳定性,提高了时栅转台标定效率,时栅转台的精度达到2.4″。

英文摘要：

Precision Calibration of time grating turntable is a very important process in process of industrialization, which reflects precision and reliability of time grating turntable. In view of traditional calibration system with laser interferometer, optoelectronic autocollimation, and metal polyhedron, efficiency of manual operation is low, reliability is ： poor, propose using home-made numerical control box combining with embedded technology, develop a kind of grid turntable automatic calibration system. The system use high-precision HEIDENHAIN RCN8510 circular grating as benchmark instrument, double micro controller and upper PC as foundation, to form double closed-loop control structure, realize real-time and online error correction and compensatlon. Experimental results show that time grating turntable calibration system adopting double closed-loop control system has high stability ,efficiency is improved,and precision of time grating turntable is up to 2.4 ＂.