中文摘要：

微等离子体已成为近年来国际上低温等离子体研究的热点课题之一。微等离子体是被限制在一个有限的空间范围内（尺度为毫米量级甚至更低）的等离子体，它通常能够运行在大气压条件下，它的低功耗、高密度、高稳定等特性以及其小巧、经济、便携等优势，为其在紫外光源的获得、微化学分析系统、生物医学、材料表面改性和加工、环境污染物的处理等领域提供了广泛的应用空间。文章对微等离子体及其应用进行了综述，介绍了各种微等离子体源的产生方法，以及它们在不同领域的研究和应用情况。

英文摘要：

Microplasma is now becoming an important field of research on non - thermal plasma. Spatial confinement to dimensions of 1 mm or less and operation at atmospheric pressure gives microplasma many advantages like low power consumption, high density, high stability and convenient portability. All these advantages open the door to a wide range of new applications of microplasma in areas such as ultraviolet sources, analytical chemistry, biomedicine, surface treatment and environmental remediation. This paper reviews a variety of methods generating microplasma and its applications in different fields.