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中文摘要：
采用微波等离子体化学气相沉积（MPCVD）方法制备了100μm米厚高质量（100）定向金刚石薄膜．利用（100）定向金刚石薄膜成功制备了α粒子探测器，-100V偏压下电荷平均收集效率为37．7％，最大的电荷收集效率达到60％以上．在此基础上，通过在α粒子探测器条状电极面蒸镀-层合适厚度的硼（10B）膜转化层，成功研制了金刚石中子探测器．镀硼之后探测器对中子有明显的响应，在1V／μm电场下，对252Cf中子的能量分辨率达到9．3％，探测效率达到1．67％．同时还研究了电场强度和硼（10B）层厚度对器件探测效率的影响规律．在厚度〈1．5μm时，随着厚度的增加，探测效率上升，当厚度〉1．5μm时，探测效率下降．
英文摘要：
High quality（100）-oriented diamond film was prepared by Microwave Plasma Chemical Vapor Deposition（MPCVD） with thickness of 100μm.A α particle detector was successfully made on the prepared film.The charge collection efficiency is 37.7% under-100V bias in average while the maximum reaches 60%.On the basis of this,diamond neutron detector is successfully developed by evaporating a layer of 10B converter with a proper thickness on the surface with an evidently increased response to α particle.At the electric field of 1V/μm,the energy resolution is 9.3%,the detecting efficiency to 252Cf neutron is 1.67%.Electric field and converter thickness have influences on the detecting efficiency.With the converter thickness increasing,the detecting efficiency increases,when the thickness reaches 1.5μm,the deteting efficiency turn to decrease.
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