中文摘要：

采用低温等离子体辅助氮化奥氏体不锈钢316L,能够在不破坏其抗腐蚀性能的同时有效提高不锈钢表面的摩擦学性能,研究了不同脉冲偏压下氮化层的结构和摩擦学性能（硬度、摩擦系数和耐磨性）。采用X射线衍射仪研究了脉冲偏压对氮化层相结构的影响;采用光学显微镜和扫描电镜分别观察了氮化层表面和横截面的形貌,并利用能量色散谱测量了氮化层中氮含量及其分布;基于纳米压痕和摩擦磨损结果,研究了脉冲偏压对氮化层摩擦学性能的影响。结果表明：低温氮化后,不锈钢表面形成一层无氮化物析出的单一过饱和固溶体相——扩展奥氏体γN,晶格常数随偏压的增加由0.359增至0.395nm。当脉冲偏压为-300 V时,氮化层厚度达9.45μm,表面硬度达21.0 GPa,摩擦系数降低至0.09,耐磨性能获得显著提高。

英文摘要：

Surfaces of 316 L stainless steel were modified by low temperature plasma-assisted nitriding. The effect of the pulse bias on the microstructures and tribological behavior was investigated with X-ray diffraction,scanning electron microscopy,energy dispersive spectroscopy and conventional mechanical probes. The results show that the pulse bias has a major impact. To be specific,as the pulse bias increased,N-content in the expanded austeniteγN,aprecipitation-free supersaturated solid solution,increased with the lattice-constant increasing from 0. 359 to0. 395 nm; the surface hardness and modulus increased,accompanied by the decreases of the friction coefficient and wear-rate. Nitrided at-300 V,the hardness and modulus of the nitrided layer,9. 45 μm thickened 40. 0%（ at.） of N-content,increased up to 21. 0 and 290. 9 GPa,respectively. The friction coefficient decreased from 0. 58 to 0. 09,and the wear-rate was only 1% of that of the substrate.