欢迎您！东篱公司
退出
-
申报数据库
-
立项数据库
-
成果数据库
-
项目获奖数据库
中文摘要：
根据集束型设备群的特点，对调度问题域进行描述，并提出了带驻留约束的双臂集束型设备群调度算法．该算法利用分解方法将集柬型设备群分解为多个单集柬型设备，并在此基础上提出一种基于机械手无冲突约束的搜索调度算法，调度目标是使到达晶圆在最短基本周期内完成加工．仿真实验分析结果表明，用所提出的算法进行集束型设备群的晶圆处理是有效的．
英文摘要：
According to characteristics of the cluster tools, a problem domain of the scheduling was sup posed and defined, and a scheduling algorithm of dual-arm muti-cluster tools with residence constraints was presented as well. A decomposition method is utilized to this algorithm to break multi-cluster tools into several independent single-cluster ones, meanwhile, a free-conflict constraint scheduling algorithm is presented with an objective of minimizing the fundamental period of the current wafers. Simulated experiments were designed to evaluate the proposed algorithm. The results indicate that the proposed algorithm is valid to schedule the wafers on the multi cluster tools.
同期刊论文项目
同项目期刊论文
A multiple-criteria real-time scheduling approach for multiple-load carriers subject to LIFO loading
Try and error-based scheduling algorithm for cluster tools of wafer fabrications with residency time
Modelling and scheduling analysis of multi-cluster tools with residency constraints based on time co
Heuristic tabu search scheduling algorithm for wet-etching systems in semiconductor wafer fabricatio
Scheduling method for single-arm cluster tools of wafer fabrications with residency and continuous r
An efficient analytical method for performance evaluation of transfer lines with unreliable machines
期刊信息
位置：