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中文摘要：
为了最大化瓶颈工站的利用率,在获得较高系统产能（TH）的同时得到一个合理的制造周期（CT）,构建了一种确定半导体晶圆制造系统中瓶颈工站前合适的时间缓冲的启发式算法.首先,根据排队理论及系统随机变动特性,提出了G/G/m排队网络模型.其次,根据瓶颈工站多重入特性,对时间缓冲进行分解.在此基础上,提出了一种确定合适时间缓冲的启发式算法.最后,根据时间缓冲,提出投料策略,并对算法进行仿真实验.结果表明,所提出的算法是有效可行的.
英文摘要：
To maximize the utilization of the bottleneck workstation,and achieve a high throughput as well as a reasonable cycle time,a heuristic algorithm was put forward for determining the right time buffer before the bottleneck workstation in semiconductor wafer fabrication system.Firstly,a G/G/m queuing model is proposed based on the queuing theory and the system＇s random variability.Secondly,according to the characteristics of reentrance of the bottleneck workstation,a time buffer decomposition method is presented.On the basis of the work mentioned above,a heuristic algorithm is built for determining the reasonable time buffer.Finally,a release policy is proposed based on the time buffer,and a simulation experiment is designed to evaluate the proposed algorithm.The results indicate that the algorithm is valid and feasible.
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