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中文摘要：
为了在半导体制造改进簇工具的生产率，根据声明安排问题，一次尝试和基于错误的安排算法与住处时间限制和在簇工具中为晶片工作最小化 Makespan 的一个目的被建议。第一，安排问题的数学明确的表达被使用一个安排领域的假设和定义介绍。资源冲突在造的安排模型被分析，并且解决资源冲突的政策被造。一个安排算法被开发。最后，建议算法的表演被评估并且与那些相比由模拟的另外的方法。实验结果显示建议算法在解决簇工具的安排问题有效、实际。
英文摘要：
To improve the productivity of cluster tools in semiconductor fabrications, on the basis of stating scheduling problems, a try and error-based scheduling algorithm was proposed with residency time constraints and an objective of minimizing Makespan for the wafer jobs in cluster tools. Firstly, mathematical formulations of scheduling problems were presented by using assumptions and definitions of a scheduling domain. Resource conflicts were analyzed in the built scheduling model, and policies to solve resource conflicts were built. A scheduling algorithm was developed. Finally, the performances of the proposed algorithm were evaluated and compared with those of other methods by simulations. Experiment results indicate that the proposed algorithm is effective and practical in solving the scheduling problem of the cluster tools.
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