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Abnormal oxidation in nickel silicide and nickel germanosilicide in sub-micro CMOS
  • 期刊名称:Chin. Phys. B
  • 时间:2012.6.1
  • 页码:068502-068505
  • 分类:O641.121[理学—物理化学;理学—化学] TQ051.893[化学工程]
  • 作者机构:[1]College of Electrical Engineering, Zhejiang University, Hangzhou 310027, China, [2]Second Affiliated Hospital, Zheiiang University College of Medicine, Zhejiang University, Hangzhou 310007, China
  • 相关基金:Project supported by the National Natural Science Foundation of China (Grant No. 61176101), the "Zijing Program Foundation" of Zhejiang University, and the Natural Science Foundation of Zhejiang Province for Oversea Returners.
  • 相关项目:基于硅基一维纳米线的Gate-all-around纳米晶体管的研究
作者: 汪涛|
中文摘要:

Corresponding author. E-mail: liuyan2010@zju.edu.cn Corresponding author. E-mail: shengk@zju.edu.cn

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