中文摘要：

针对超精密气浮工件台的振动特性展开研究,提出了一种气固耦合的仿真处理方法.采用在气浮孔中施加对地弹簧的方法来模拟气浮系统,建立了工件台系统的动力学模型,推导出了系统的振动方程,对振动特性进行了求解和分析,得到了系统的固有频率和振型,对系统的结构刚度有了一个较为准确的估计.仿真结果表明振动对工件台定位精度影响很小,但会给测量造成一些误差.由仿真辨识出了气浮引起的振动频率范围,为系统的进一步优化提供了理论依据.通过试验证明了仿真模型的正确性和精确程度,并由试验结果证实了由气浮产生的振动远小于由系统结构引起的振动.

英文摘要：

In this paper to study the vibration for ultra-precision stage with air bearing,a simulation method for the gas-solid couple stage is presented.In this method the node-to-ground translational springs are built for air-foot.A dynamic model of the stage is established,and the vibration equations are derivate.The vibration characteristic of the stage is analyzed and simulated,and the results of simulation are verified by the experiment.The simulation results show that the precision of measure has been influenc...