中文摘要：

结合石墨烯场效应晶体管和机械谐振原理,研究了基于本地背栅石墨烯谐振沟道晶体管（RCT）的高频机械信号直接读取方法.利用机械剥离法获得的石墨烯,提出了一种基于刻蚀技术的器件制备方法,并实现了栅长和栅宽分别为1um的本地背栅RCT.实验结果表明,在室温下RCT的谐振频率范围为57.5-88.25 MHz.研究结果对加速石墨烯纳米机电系统和高频低噪声器件的应用有着重要作用.

英文摘要：

The direct radio frequency read out method based on local back-gate graphene resonant channel transistor（RCT） is studied by combining the operation principles of graphene field-effect transistor and mechanical resonator.A novel method of fabricating local gate graphene RCT is proposed,and a graphene RCT with 1μm×1μm dimension channel is realized based on exfoliation graphene. The measured resonant frequency of graphene RCT is in a range of 57.5-88.25 MHz at room temperature.This work is useful to pave the way of graphene application to Nano-eletromechanical system and high frequency low-noise amplifier.