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中文摘要：
工业生产中普遍采用液态三氯氧磷（POCl3）作为多晶硅太阳电池的扩散磷源。研究了各种工艺参数对扩散方块电阻的大小及均匀性的影响。结果表明：提高扩散温度、增加主扩散时间、减小再分布时间、增加小氮流量、减小大氮流量。可以减小方块电阻；合理设置炉管内的温度分布、适当增加大氯流量，可以改善方块电阻的均匀性；氧气流量对方块电阻影响不大。得到了一组优化的扩散工艺参数。测得方块电阻为55．1Ω/□。片内极差为5．6％。片间极差为3．1％。
英文摘要：
Liquid POCI3 is generally adopted in industrial production as diffusion phosphorus source. The effects of various technology parameters on the value and uniformity of diffusion square resistance were investigated in this paper. The results show that the value of diffusion square resistance can be decreased by enhancing diffusion temperature, increasing main diffusion time, reducing re-distribution time, increasing carrier gas flow ,and reducing nitrogen flow; the uniformity of diffusion square resistance can be improved by setting reasonable temperature distribution and appropriately increasing nitrogen flow; the effect of oxygen flow on square resistance is negligible. A set of optimal diffusion technology parameters were obtained. Under the optimal conditions, the value of square resistance is 55.1Ω/□; the range on a wafer is 5.6%; the range among wafers is 3.1%.
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