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中文摘要：
利用中心波长为1040nm、脉宽为190fs、重复频率在200～5000kHz之间可调的飞秒激光对熔融石英进行微加工。研究了烧蚀阈值随脉冲重复频率、扫描速度的变化规律，阐明不同参数下热扩散效应及热累积效应对烧蚀过程的主导作用。在最优化条件下，制作了双线波导，可以对1040nm激光实现圆形基模传输。进一步制作了椭圆晶胞的六角微结构波导，对1040nm激光可以输出近高斯强度分布的基模，模场面积达到247．48μm2该微结构波导可实现单偏振传输，消光比达9．05，波导数值孔径约0．017。
英文摘要：
Femtosecond laser at 1040 nm centre wavelength with 190 fs pulse width and variable （200-5000 kHz） repetition rate has been applied to microfabricate fused silica. Threshold energy has been measured as a function of the pulse repetition rate and the scan speed. The role of thermal diffusion and heat accumulation effects in forming waveguide is demonstrated. Double-line waveguides with the optimal parameters have been written, where the guided mode is fundamental mode and nearly circular. Hexagonal microstructure waveguide with elliptical cells has been made, where the mode has a nearly Gaussian intensity profile at 1040 nm. The microstructure waveguide has a large mode area about 247.48 μm2 and single polarization propagation property with extinction ratio about 9.05. The numerical aperture of the waveguide is about 0. 017.
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