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A Trapezoidal Cantilever Density Sensor Based on MEMS Technology
  • 所属机构名称：西安交通大学
  • 会议名称：14th Annual Conference of the Chinese Sosiety of Micro/Nano Technology
  • 时间：2012.11.11
  • 成果类型：会议
  • 相关项目：纳米制造中的计量溯源与测试理论研究
作者： Libo Zhao|Longqi Xu|Guiming Zhang|Zhuangde Jiang|Yu Qin|Yulong Zhao|Xiaopo Wang|Zhigan Liu|
同会议论文项目
纳米制造中的计量溯源与测试理论研究
期刊论文 90 会议论文 38 著作 1
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