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Structure analysis of nano-scale dual-step fabricated by Focused Ion Beam
  • 所属机构名称：西安交通大学
  • 会议名称：13th IEEE International Conference on Nanotechnology (IEEE-NANO 2013)
  • 时间：2013.8.8
  • 成果类型：会议
  • 相关项目：纳米制造中的计量溯源与测试理论研究
作者： Chenying Wang, Zhuangde Jiang, Shuming Yang,et al|
同会议论文项目
纳米制造中的计量溯源与测试理论研究
期刊论文 90 会议论文 38 著作 1
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