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On Dynamic Behavior of Triangular Shaped Cantilevers in MEMS Sensors: Effect of Curvature
  • 所属机构名称：西安交通大学
  • 会议名称：The 10th IEEE International Conference on Solid-State and Integrated Circuit Technology
  • 时间：2010.11.11
  • 成果类型：会议
  • 相关项目：纳米制造中的计量溯源与测试理论研究
作者： Gui-Ming Zhang, Li-Bo Zhao, En-Ze Huang,et al|
同会议论文项目
纳米制造中的计量溯源与测试理论研究
期刊论文 90 会议论文 38 著作 1
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