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Capacitive Micromachined Ultrasonic Transducer as A Resonant Temperature Sensor
  • 所属机构名称：西安交通大学
  • 会议名称：8th International conference on Nano/Micro Engineered and Molecular Systems (NEMS2013)
  • 时间：2013.4.4
  • 成果类型：会议
  • 相关项目：纳米制造中的计量溯源与测试理论研究
作者： Zhikang Li, Libo Zhao, Zhiying Ye, Hongyan Wang,|
同会议论文项目
纳米制造中的计量溯源与测试理论研究
期刊论文 90 会议论文 38 著作 1
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