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Impact of line edge roughness and linewidth roughness on critical dimension variation
  • 所属机构名称：西安交通大学
  • 会议名称：2012 IEEE International Conference on Computer Science and Automation Engineering (CSAE)
  • 时间：2012.5.5
  • 成果类型：会议
  • 相关项目：纳米制造中的计量溯源与测试理论研究
作者： Fengxia Zhao|Qinghai Wang|Linna Zhang|Zhuangde Jiang|
同会议论文项目
纳米制造中的计量溯源与测试理论研究
期刊论文 90 会议论文 38 著作 1
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