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Design, modeling and characterization of a 2-DOF precision positioning platform
  • ISSN号：0142-3312
  • 期刊名称：Transactions of the Institute of Measurement and C
  • 时间：2015.3.1
  • 页码：396-405
  • 相关项目：大行程微/纳表面测量与表征系统及其关键技术
作者： X. Li|Y. Qin|D. Zhang|B. Shirinzadeh|
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大行程微/纳表面测量与表征系统及其关键技术
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