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Developmentof a piezo-driven 3-DOF stage with T-shape flexible hinge mechanism
  • ISSN号：0736-5845
  • 期刊名称：Robotics and Computer-Integrated Manufacturing
  • 时间：2015.12.1
  • 页码：125-138
  • 相关项目：大行程微/纳表面测量与表征系统及其关键技术
作者： Y. Tian|F. Wang|D. Zhang|B. Shirinzadeh|
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大行程微/纳表面测量与表征系统及其关键技术
期刊论文 23
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