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Design, Identification and Control of a 2-Degree of Freedom Flexure-Based Mechanism for Micro/Nano M
  • ISSN号：1941-4900
  • 期刊名称：NANOSCIENCE AND NANOTECHNOLOGY LETTERS
  • 时间：2013.9
  • 页码：960-967
  • 相关项目：大行程微/纳表面测量与表征系统及其关键技术
作者： Gao, W.|Zhang, D.|Eichhorn, V.|Fatikow, S.|
同期刊论文项目
大行程微/纳表面测量与表征系统及其关键技术
期刊论文 23
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