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Design issues in a decoupled XY stage: Static and dynamics modeling, hysteresis compensation, and tr
  • ISSN号：0924-4247
  • 期刊名称：Sensors and Actuators A: Physical
  • 时间：2013.5.1
  • 页码：95-105
  • 相关项目：大行程微/纳表面测量与表征系统及其关键技术
作者： Qin, Yanding|Shirinzadeh, Bijan|Tian, Yanling|Zhang, Dawei|
同期刊论文项目
大行程微/纳表面测量与表征系统及其关键技术
期刊论文 23
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