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Transition-metal Impurities Removal from Metallurgical Grade Silicon by Electron Beam Injection
  • 期刊名称：Material Science Forum
  • 时间：2011.7.7
  • 页码：105-108
  • 相关项目：电子束注入对多晶硅Si/SiO2界面处杂质硼迁移的影响研究
作者： Ruixun Zou|Dachuan Jiang|Wei Dong|Zheng Gu|Yi Tan|
同期刊论文项目
电子束注入对多晶硅Si/SiO2界面处杂质硼迁移的影响研究
期刊论文 21 专利 5
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