冶金法是我国走出硅原料依赖,发展低成本、环境友好的太阳能级多晶硅制备技术的必经之路,冶金法自诞生以来在世界范围内经历了三次研究高潮,第三次正是在以我国科研和产业工作者为主导和推动下发展的,并形成了大量有益的科学结论和实践经验。本文从冶金法的界定开始,详细分析了冶金法提纯的理论基础,饱和蒸汽压机理、偏析机理和氧化性差异机理,介绍了以上机理所衍生出的技术方法及进展,并对冶金法的发展前景进行了展望。
Purification polycrystalline silicon by metallurgical method is the only way for our country to escape the dependency of silicon feedstock, and to develop low-cast and environmental friendly process for SOG-Si. Since its emergence, metallurgical method has undergone three research surges. The third development is under the leading and promotion of our country's research and industry workers, obtaining considerable useful scientific theory and practical experience. In this paper, from the definition of metallurgical method, the basic theories of metallurgical method, including saturated vapor pressure principle, segregation mechanism and differences in mechanism of oxidation, are ana- lyzed in detail; moreover, technologies and their progress derived from the mechanisms are presented. At the end, the trend of metallurgical method is forecasted.