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Preparation of Porous Silicon and Effect of Gettering on the Resistivity
  • ISSN号：1022-6680
  • 期刊名称：Advanced Materials Research
  • 时间：2012.3.3
  • 页码：1794-1797
  • 相关项目：电子束注入对多晶硅Si/SiO2界面处杂质硼迁移的影响研究
作者： Suxia Guo|Yi Tan|Jiayan Li|Yaqiong Li|Chenguang Liu|
同期刊论文项目
电子束注入对多晶硅Si/SiO2界面处杂质硼迁移的影响研究
期刊论文 21 专利 5
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