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Effect of driving frequency on plasma property in radio frequency and very high frequency magnetron
  • 期刊名称：Plasma Sources Sci. Technol.
  • 时间：2014.1.1
  • 页码：-
  • 相关项目：多频CCP/ICP混合放电等离子体源的若干关键物理问题的研究
作者： Fupei Huang|Chao Ye|Haijie He|Yi Liu|Xiangying Wang|Zhaoyuan Ning|
同期刊论文项目
多频CCP/ICP混合放电等离子体源的若干关键物理问题的研究
期刊论文 26 会议论文 1
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