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Light emission from a-Si:C:O:H films fabricated by C2F6 and O-2/C2F6 plasma treating silicone oil li
  • ISSN号：0022-2313
  • 期刊名称：Journal of Luminescence
  • 时间：2012.9.9
  • 页码：2416-2420
  • 相关项目：多频CCP/ICP混合放电等离子体源的若干关键物理问题的研究
作者： Chen, Tian|Ye, Chao|Deng, Yanhong|Yuan, Ying|Ge, Shuibin|Xu, Yijun|Ning, Zhaoyuan|Pan, Xiaopin|Wang, Zhenmin|
同期刊论文项目
多频CCP/ICP混合放电等离子体源的若干关键物理问题的研究
期刊论文 26 会议论文 1
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