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Growth of few-layer graphene on SiC at low temperature with the fluorocarbon plasma pre-etching
  • ISSN号：0040-6090
  • 期刊名称：Thin Solid Films
  • 时间：2013
  • 页码：66-68
  • 相关项目：多频CCP/ICP混合放电等离子体源的若干关键物理问题的研究
作者： Yijun Xu|Xuemei Wu|Chao Ye|
同期刊论文项目
多频CCP/ICP混合放电等离子体源的若干关键物理问题的研究
期刊论文 26 会议论文 1
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