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Abnormal Enhancement of N-2(+) Emission Induced by Lower Frequency in N-2 Dual-Frequency Capacitivel
  • ISSN号：1009-0630
  • 期刊名称：Plasma Science and Technology
  • 时间：2012.3.3
  • 页码：222-226
  • 相关项目：多频CCP/ICP混合放电等离子体源的若干关键物理问题的研究
作者： Yu Yiqing|Xin Yu|Lu Wenqi|Ning Zhaoyuan|
同期刊论文项目
多频CCP/ICP混合放电等离子体源的若干关键物理问题的研究
期刊论文 26 会议论文 1
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Effect of Internal Antenna Coil Power on the Plasma Parameters in 13.56 MHz/60 MHz Dual-Frequency Sputtering＊
Experimental Characterization of Dual-Frequency Capacitively Coupled Plasma with Inductive Enhancement in Argon
期刊信息
  • 《等离子体科学与技术：英文版》
  • 主管单位:中国科学院 中国科协
  • 主办单位:中国科学院等离子体物理研究所 中国力学学会
  • 主编：万元熙、谢纪康
  • 地址：合肥市1126信箱
  • 邮编：230031
  • 邮箱：pst@ipp.ac.cn
  • 电话：0551-5591617 5591388
  • 国际标准刊号：ISSN：1009-0630
  • 国内统一刊号：ISSN：34-1187/TL
  • 邮发代号:
  • 获奖情况:
  • 国内外数据库收录:
  • 美国化学文摘（网络版）,荷兰文摘与引文数据库,美国工程索引,美国剑桥科学文摘,美国科学引文索引（扩展库）,英国科学文摘数据库
  • 被引量:89