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A Novel Piezoelectric Grinding Dynamometer for Monitoring Ultra-precision Grinding of Silicon Wafers
  • 期刊名称：Advanced Materials Research
  • 时间：0
  • 页码：707-712
  • 语言：英文
  • 相关项目：硅片与光电晶体基片的高效低损伤超精密磨削技术研究
作者： Ren Ke Kang|Bo Liu|Xiang Long Zhu|Min Qian|Jun Zhang|
同期刊论文项目
硅片与光电晶体基片的高效低损伤超精密磨削技术研究
期刊论文 74 著作 1
同项目期刊论文
大尺寸硅片自旋转磨削运动分析与仿真
单晶硅片超精密磨削技术与设备
Experimental Study on Micro-Nano Scratching of Mono-Crystalline Silicon Wafer
Study on the Subsurface Damage Distribution of the Silicon Wafer Ground by Diamond Wheel
Development of Three-Dimensional Dynamometer for Wafer grinder
树脂游离磨料线切割硅晶体中的磨料力学行为研究综述
Design and Simulation of Grinding Force Control System for Wafer Self-rotating Grinding
The research on the improved CMG tool for Al2O3 ceramic
硅片自旋转磨削损伤深度的试验研究
树脂结合剂金刚石砂轮精密磨削单晶硅片的磨削力研究
硅片自旋转磨削表面粗糙度建模与分析
应用软磨料磨削的单晶硅超精密制造技术
单晶硅片磨削的表面相变
单晶硅片磨削损伤的透射电子显微分析
Raman Analysis of the Silicon Wafer Scratched by Single Point Diamond
Research on the Chemical-Mechanical Grinding (CMG) Tools for Al2O3 Ceramic
Surface shape control of the workpiece in a double-spindle triple-workstation wafer grinder
Surface and Subsurface Damages of CdZnTe Substrates Ground by Diamond Grinding Wheel
树脂结合剂含量对单晶硅片减薄加工用砂轮性能的影响规律研究
Research on topography control of two-spindle and three-workstation wafer grinder
硅片加工表面层损伤检测技术的试验研究
Research on the Polishing Performance of CMP Slurry for the Sapphire Crystal
大尺寸Si片自旋转磨削表面的损伤分布研究