ZnO薄膜是一种具有优良性质的材料,如光电、p-n结特性等,并有多种制备方法,其性质取决于不同的掺杂组分。概述了ZnO薄膜的制备方法、晶格特性、光电特性、p-n结特性及其磁性掺杂。
ZnO thin films have many excellent properties such as photoelectricity, p-n junctionetc. There are many methods to prepare ZnO thin films, whose properties depend on dopants and preparation conditions. This paper describes the preparation methods, crystal lattice, photoelectricity, p-n junction and magnetic doping of ZnO thin films.