中文摘要：

绒面掺铝氧化锌（AZO）透明导电薄膜由于电阻率低、在可见光区域透过率高、绒面结构能有效散射入射光,提高太阳电池光电转换效率,被广泛应用于太阳电池前电极。概述了绒面AZO薄膜的制备方法,重点介绍了磁控溅射技术沉积AZO薄膜后再进行湿法刻蚀制绒面方法,制备的样品呈现＂坑状＂或＂类月球地貌＂的绒面,并讨论了工艺对薄膜结构、光电性能和刻蚀行为的影响,最后介绍了绒面AZO薄膜在硅薄膜太阳电池中的应用,进一步降低生产成本和实现大规模产业化生产是绒面AZO薄膜的发展趋势。

英文摘要：

Textured aluminum doped ZnO（AZO）transparent conductive films are widely used as front contacts in solar cells due to the low resistivity,high transmittance in the visible region,incident light scattering effectively for the textured structure and improving the photoelectric conversion efficiency.The preparation methods of the textured AZO are summarized.It is introduced in detail that the texture surface is made by the wet etching after AZO films are deposited by magnetron sputtering technology.The samples show the ＂crater＂ or ＂lunar landscape-like＂ appearance.The effects of the process on film structures,photoelectric properties and etching behaviors are discussed.Finally,the applications of textured AZO in silicon thin film solar cells are introduced,the development trends of textured AZO thin films are further reducing production costs and achieving large-scale industrial production.