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中文摘要：
系统响应率是光学读出微梁焦平面阵列（Focal Plane Array,FPA）红外成像的关键性能参数。在刀口滤波光学读出技术中,系统响应率的主要组成部分——光学读出灵敏度与微梁反光板的长度密切相关,并受到反光板弯曲变形的严重影响。由于残余应力在制作过程中不可避免地存在,微梁反光板都有弯曲变形,膜厚相同的反光板具有相同的变形曲率半径。本文利用傅里叶光学分析了反光板长度和弯曲变形对光学读出灵敏度的影响,构建并实验验证光学读出灵敏度理论模型。根据该模型,分析了系统响应率与反光板长度之间关系,理论分析与实验结果相符。结果表明,通过减薄SiNx厚度并使反光板处于该厚度下的最优长度,不仅能提高红外成像的系统响应率,而且能同时提高红外成像的空间分辨率。
英文摘要：
Sensor responsivity is a key performance parameter of IR （Infrared） imaging using bimaterial microcantilever focal plane array （FPA） and optical readout method. For the optical readout method using knife-edge filtering technique, the optical sensitivity, an important part of the sensor responsivity, is closely related to the length of the mirror, and is seriously affected by the undesired deformation of the mirror. The deformation always exists due to the imbalanced residual stress induced by fabrication process. The deformation curvature radius is determined by the thicknesses of the films. In this paper, the influence of the length and deformation of the mirror on the optical sensitivity is discussed, and then a theoretical sensitivity model is established and validated. According to the model, the relation between the sensor responsivity and the length of the mirror is analyzed. The analysis is validated by experiment. It is demonstrated that, reducing the thickness of SiNx film and making the length of the mirror be the optimum length not only can increase the sensor responsivity, but also can improve the spatial resolution.
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