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计及毛细力作用时旋转式MEMS/NEMS致动器的吸合稳定性
  • 期刊名称：机械强度
  • 时间：0
  • 页码：391-395
  • 语言：中文
  • 分类：TN303[电子电信—物理电子学] O317[理学—一般力学与力学基础;理学—力学]
  • 作者机构：[1]天津工程师范学院机械系,天津300222, [2]天津大学力学系,天津300072
  • 相关基金：国家自然科学基金（10802057）和国家自然科学基金重点项目（10732080）资助项目.
  • 相关项目：微纳尺度实验力学中的传感、测量、识别新方法研究
作者： 亢一澜|郭建刚|周丽军|
关键词： 微/纳电子机械系统致动器, 吸合, 稳定性, 毛细力, Micro-or Nano-electro-mechanical system （MEMS/NEMS） actuator, Pull-in, Stability, Capillary force
中文摘要：

建立旋转式MEMS/NEMS（micro-or nano-electro-mechanical system）致动器的单自由度力学模型，研究毛细力对该类致动器吸合时的临界倾角以及临界电压的影响。得到临界倾角随结构特征尺寸的变化曲线，并对临界电压进行修正。研究没有外加电压引起的静电力作用时，旋转式MEMS/NEMS致动器在毛细力作用下的失稳现象，给出致动器的失稳准则，以及失稳时致动器的临界特征几何尺度。

英文摘要：

A one-degree of freedom mechanical model of a torsional micro-or nano-electro-mechanical system （MEMS/NEMS） actuator was presented. With the capillary force taken into consideration, the critical tilting angle and the pull-in voltage of the torsional MEMS/NEMS actuator were investigated, respectively. The size-dependent critical tilting angle of the torsional MEMS/NEMS actuator was illustrated, and the modified factor of the pull-in voltage was derived. When there was not electrostatic force induced by the applied voltage in the system, the instabilities of the torsional MEMS/NEMS actuator caused by capillary effects were studied. The instability criterion of the actuator was presented, and the critical gap distance, gcr, between the mainplate and the substrate was derived.

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