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中文摘要：
文中提出一种基于双时栅位移传感器的高速高精度位移测量系统。通过建立蜗杆运动与测头运动的对应关系的模型和采用时间细分技术的高精度运动控制建立采样点实际坐标与下一采样点坐标之间的映射关系,实现环面蜗杆加工误差的在线高速高精度随动测量。该系统在15 r/min的转台转速下的重复定位精度达到5μm,对蜗杆误差进行测试得到的误差范围为-5.1″~4.2″。
英文摘要：
A high speed and high precision displacement measurement method based on double time grating displacement sensors was proposed in this paper.The high speed and high precision online servo measurement of the torus worm can be realized by establishing the model of the corresponding relation between worm movement and measuring head movement,and using a high precision motion control adopted the technology of time segmentation to build the map of coordinates between current and next sample points.The repeated positioning accuracy of this system is 5 μm with 15 r/min speed of rotary table,and the tested error range of the worm is-5.1 arc-seconds to 4.2 arc-seconds.
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