中文摘要：

针对高速、重载、超大等极端条件和中空、狭窄、限重等一些不能安装普通传感器的特殊条件下的全闭环精密测量与精密控制问题，沿袭前期时栅传感器研究基础，提出一种将被测齿轮与传感器融汇一体的新方法。采用非接触、密封的离散测头线圈直接把被测齿轮、蜗轮、蜗杆、齿条、丝杠等当作均匀分度的“齿栅”，作为新检测方法的行波产生器件，再用时钟脉冲作为位移精密测量的基准。另外采用4对径离散测头消除除去4n（n=1，2，3，…）次以外的各次谐波误差，保证寄生式时栅动态的位移测量精度，并从理论和实验上证明了该方法的正确性和有效性。这种寄生式时栅具有体积小、重量轻、成本低、抗强振动和抗强污染等显著特色，应用前景广泛。

英文摘要：

Aiming at the fully-closed-loop precise measurement and control problem under harsh environment, such as high speed, heavy loading, huge size ; and special conditions, such as hollow, narrow, limited weight,where traditional sensors are not suitable to be installed, a novel approach integrating measured gears with sensors is presented based on previous research work of time grating sensor. Using the non-contact and sealed discrete coils, the measured gears, worm wheels, worms,splines and lead screws are directly taken as gear type grating with equal graduation, which can be served as novel travelling wave generators. The high frequency clock pulses are employed as the measuring standard for precise displacement measurement. Except 4 n （n = 1,2,3,…） order harmonic errors, other order harmonic errors of parasitic time grating sensors can be eliminated with 4 radial measuring probes,and the dynamic displacement measurement precision of parasitic time grating can be guaranteed. Theoretical analysis and experiment prove the correctness and validity of the proposed method. The improved parasitic time grating sensors have the characteristics of small size ,light weight,low cost and strong resistant capacity to vibration and pollution ,and have broad application prospect.