中文摘要：

为了提高时栅位移传感器的测量精度及分辨率,提出了一种基于STM32F4的时栅位移传感器信号处理系统;系统包括硬件电路设计和软件设计;硬件电路以STM32F4内核处理器芯片和复杂可编程逻辑器件CPLD为核心,集成了信号调理、信号处理等电路模块;运用高频时钟脉冲插补时栅位移传感器感应信号和参考信号之间的相位差,通过软件设计控制信号的采集和处理,实现了相位检测;经实验验证,采用以STM32F4为核心的时栅信号处理系统后,时栅位移传感器的角度误差峰峰值达到2.4＂,实现了高精度、高分辨率的时栅角位移测量.

英文摘要：

In order to improve the measuring accuracy and resolution of time grating displacement sensor,we have put forward a time grating displacement sensor signal processing system based on STM32F4.This system includes hardware circuit and software design.The hardware circuit used STM32F4 kernel processor chip and complex programmable logic device CPLD as the core,including the integrated sig nal conditioning,signal processing circuit module,etc.Through the software design controled time gate signal acquisition and processing.In serted phase difference between induction signal and reference signal by using the high-frequency pulse of STM32F4 kernel to complete the phase detection.By using this system,the experiments indicated that the peak-to-peak value of time grating position error is only 2.4＂.Realized the high precision and high resolution angular displacement measurement of time grating sensor.