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Deposition of c-axis orientation aluminum nitride films on flexible polymer substrates by reactive d
  • ISSN号：0040-6090
  • 期刊名称：Thin Solid Films
  • 时间：2012.5.5
  • 页码：4863-4870
  • 相关项目：集成化射频高Q薄膜体声波谐振器
作者： Jin, H.|Zhou, J.|Dong, S. R.|Feng, B.|Luo, J. K.|Wang, D. M.|Milne, W. I.|Yang, C. Y.|
同期刊论文项目
集成化射频高Q薄膜体声波谐振器
期刊论文 38 会议论文 17 专利 17
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