作者机构:[1]nghua National Laboratory for Information Science and Technology, Institute of Microelectronics, Tsinghua University, Beijing 100084, China, [2]Shanghai Institute of Microsystem and Information Technology, State Key Laboratory of Transducer Technology, Shanghai 200050, China, [3]Department of Electrical Engineering, University of California, Riverside, CA 92521, USA
相关基金:Supported by the National Natural Science Foundation of China (Nos. 61025021, 60936002, 60729308, 61011130296, and 61020106006), and the National Key Projects of Science and Technology of China (No. 2009ZX02023-001-3)